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DB of the Thermophysical Properties of Gases Used in the Semiconductor Industry


DB of the Thermophysical Properties of Gases Used in the Semiconductor Industry

General information
Name:DB of the Thermophysical Properties of Gases Used in the Semiconductor Industry
Abbreviation:
Website:http://www.nist.gov/pml/div685/grp02/srd_134_gases_semiconductor.cfm
Phone:+13019752476
Fax:
e-Mail:john.hurly@nist.gov
Comments:

Keywords
semiconducting, thermophysical

Developers
CountryNameAddress
USANational Institute of Standards and Technology (NIST)A329 Materials Building, Gaithersburg, MD 20899 USA

Literature References
No references for the database found


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