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Fokin L., Kalashnikov A., Petkov I., Pirgov P., Popov V., Zarkova L.
Joint Russian and Bulgarian Academies of Sciences Database of intermolecular potentials and diffusion coefficients for components of the CVD processes in microelectronics
// Int.J.Thermophysics. 2001. Volume: 22. Number: . Pages: 1497-1506.

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1DB on Intermolecular Potentials and Diffusion Coefficients for Components of the CVD Processes in Microelectronics
(EPIDIF)
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e-Mail: lfokin@mail.ru
Diffusion coefficients for components of the CVD processes in microelectronics.

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