DB of the Thermophysical Properties of Gases Used in the Semiconductor Industry

General information
Name:	DB of the Thermophysical Properties of Gases Used in the Semiconductor Industry
Abbreviation:
Website:	https://www.nist.gov/pml/sensor-science/fluid-metrology/database-thermophysical-properties-gases-used-semiconductor
Phone:	+13019752476
Fax:
e-Mail:	john.hurly@nist.gov
Comments:
Status:	active

Keywords
semiconducting, thermophysical

Developers
Country	Name	Address
USA	National Institute of Standards and Technology (NIST)	A329 Materials Building, Gaithersburg, MD 20899 USA

Literature References
No references for the database found