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Калашников А.Н., Фокин Л.Р.
Транспортные свойства смеси разреженных газов N2-H2 в базе данных ЭПИДИФ
// Теплофиз.высок.температур. 2009. Volume: 47. Number: . Pages: 675-687.

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1DB on Intermolecular Potentials and Diffusion Coefficients for Components of the CVD Processes in Microelectronics
(EPIDIF)
[see details...]
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e-Mail: lfokin@mail.ru
Diffusion coefficients for components of the CVD processes in microelectronics.

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